Method for depositing low temperature phosphorous-doped silicon

ABSTRACT

Methods and devices for low-temperature deposition of phosphorous-doped silicon layers. Disilane is used as a silicon precursor, and nitrogen or a noble gas is used as a carrier gas. Phosphine is a suitable phosphorous precursor.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to U.S. Provisional Patent Application Ser. No. 62/977,671 filed Feb. 17, 2020 titled METHOD FOR DEPOSITING LOW TEMPERATURE PHOSPHOROUS-DOPED SILICON, the disclosure of which is hereby incorporated by reference in its entirety.

FIELD OF INVENTION

The present disclosure generally relates to methods and systems suitable for forming electronic devices. More particularly, the disclosure relates to methods and systems that can be used for depositing material, for example for selectively depositing material, such as doped semiconductor material, on a surface of a substrate.

BACKGROUND OF THE DISCLOSURE

The scaling of semiconductor devices, such as, for example, complementary metal-oxide-semiconductor (CMOS) devices, has led to significant improvements in speed and density of integrated circuits. However, conventional device scaling techniques face significant challenges for future technology nodes.

One particular challenge relates to reduction in contact resistance to the active regions of a semiconductor device structure. Furthermore, in many applications, it may be desirable to selectively deposit semiconductor material (e.g., highly-doped Group IV semiconductor material) that incorporates a dopant. However, such techniques may not be well developed. Accordingly, improved methods and systems for depositing doped semiconductor material are desired.

In addition, there is a particular need for depositing semiconductor material at ever lower temperatures because the thermal budget that many advanced electronic devices can withstand is limited.

Any discussion, including discussion of problems and solutions, set forth in this section has been included in this disclosure solely for the purpose of providing a context for the present disclosure. Such discussion should not be taken as an admission that any or all of the information was known at the time the invention was made or otherwise constitutes prior art.

SUMMARY OF THE DISCLOSURE

Provided herein is a method for epitaxially growing a phosphorous-doped silicon layer. The method comprises providing a substrate comprising a monocrystalline silicon surface in a reactor chamber. Then, disilane, phosphine, and a carrier gas are introduced into the reactor chamber while maintaining the reaction chamber at a temperature of at least 350.0° C. to at most 450.0° C. and at a pressure of at least 10,600 Pa. Thereby, a phosphorous doped silicon layer is grown on the monocrystalline silicon surface. Note that the carrier gas may consist of nitrogen and/or one or more noble gasses.

Further provided is a method for selectively growing an epitaxial phosphorous-doped silicon layer. The method comprises providing a substrate in a reactor chamber. The substrate comprises a first surface and a second surface. The first surface is a monocrystalline silicon surface. The method comprises selectively growing a phosphorous-doped epitaxial silicon layer on the monocrystalline silicon surface by cyclically performing a sequence of sub steps i. and ii. while maintaining the reaction chamber at a temperature of at least 350.0° C. to at most 450.0° C. and at a pressure of at least 10,600 Pa. Sub step i. comprises epitaxially growing a phosphorous doped silicon layer on the monocrystalline silicon surface and growing a phosphorous doped amorphous silicon layer on the second surface by introducing disilane, phosphine, and a carrier gas into the reactor chamber. Sub step ii. comprises etching the epitaxial phosphorous doped silicon layer and etching the phosphorous doped amorphous silicon layer on the second surface by introducing an etchant into the reactor chamber. It shall be understood that the sequence of sub steps i. and ii. may be repeated until the epitaxial phosphorous doped silicon layer on the monocrystalline silicon surface has reached a pre-determined thickness. Also note that the carrier gas consists of nitrogen and/or one or more noble gasses.

In some embodiments, the reaction chamber is maintained at a temperature of at least 370° C.

In some embodiments, the reaction chamber is maintained at a temperature of at least 400° C.

In some embodiments, the reaction chamber is maintained at a temperature of at most 420° C.

In some embodiments, the reaction chamber is maintained at a pressure of at least 13,300 Pa.

In some embodiments, the reaction chamber is maintained at a pressure of at least 20,000 Pa.

In some embodiments, the reaction chamber is maintained at a pressure of at most 100,000 Pa.

In some embodiments, the disilane is provided to the reactor chamber at a disilane flow rate and the phosphine is provided to the reactor chamber at a phosphine flow rate. The phosphine flow rate divided by the disilane flow rate equals a phosphine disilane flow rate ratio. In such embodiments, the phosphine disilane flow rate ratio is from at least 0.5 to at most 1.4.

In some embodiments, the phosphine disilane flow rate ratio is from at least 0.6 to 1.2.

In some embodiments, the disilane is provided to the reactor chamber at a disilane flow rate. The carrier gas is provided to the reactor chamber at a carrier gas flow rate. The disilane flow rate divided by the carrier gas flow rate equals a disilane carrier gas flow rate ratio. In such embodiments, the disilane carrier gas flow rate ratio is from at least from at least 0.15 to at most 0.40.

In some embodiments, the disilane carrier gas flow rate ratio is from at least from at least 0.25 to at most 0.35.

In some embodiments, the second surface is a dielectric surface.

In some embodiments, the second surface is selected from the list consisting of a silicon oxide surface, a silicon nitride surface, a silicon oxycarbide surface, a silicon oxynitride surface, a hafnium oxide surface, a zirconium oxide surface, and an aluminum oxide surface.

Further described herein is a system comprising one or more reaction chambers, a gas injection system, and a controller configured for causing the system to perform a method as described herein.

Various embodiments of the present disclosure relate to selective deposition methods, to structures and devices formed using such methods, and to apparatus for performing the methods and/or for forming the structure and/or devices. While the ways in which various embodiments of the present disclosure address drawbacks of prior methods and systems are discussed in more detail below, in general, various embodiments of the disclosure provide improved methods of selectively depositing doped semiconductor layers. The doped semiconductor layers can exhibit relatively low contact resistance. Additionally or alternatively, the doped semiconductor layers can be formed at relatively low temperatures—e.g., 350° C. to 450° C. or less, without the use of a step of annealing to improve the contact resistance of the doped semiconductor layers.

In accordance with yet additional examples of the disclosure, a system to perform a method as described herein and/or to form a structure, device, or portion of either is disclosed.

These and other embodiments will become readily apparent to those skilled in the art from the following detailed description of certain embodiments having reference to the attached figures. The invention is not being limited to any particular embodiments disclosed.

BRIEF DESCRIPTION OF THE DRAWING FIGURES

A more complete understanding of the embodiments of the present disclosure may be derived by referring to the detailed description and claims when considered in connection with the following illustrative figures.

FIG. 1 illustrates a method in accordance with exemplary embodiments of the disclosure.

FIG. 2 illustrates a substrate (200) on which phosphorous-doped silicon may be deposited in accordance with exemplary embodiments of the disclosure.

FIG. 3 illustrates a system (700) in accordance with additional exemplary embodiments of the disclosure.

Throughout the drawings, the following numbering is used: 100—method; 102—substrate providing step; 104—deposition step; 108—etching step; 110—cyclic loop/repetition of deposition step (104) and etching step (108); 112—method end; 200—substrate; 202—monocrystalline bulk material; 204—non-monocrystalline material; 206—first area; 208—second area; 210—monocrystalline surface; 212—non-monocrystalline surface; 700—system; 702—substrate handling system; 704—reaction chamber; 706—injection system; 708—wall; 710—first gas source; 712—second gas source; 714—third gas source; 716—fourth gas source; 718—line; 720—line; 722—line; 724—line; 726—exhaust source; 728—controller.

It will be appreciated that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of illustrated embodiments of the present disclosure.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

The description of exemplary embodiments of methods, structures, devices and systems provided below is merely exemplary and is intended for purposes of illustration only; the following description is not intended to limit the scope of the disclosure or the claims. Moreover, recitation of multiple embodiments having stated features is not intended to exclude other embodiments having additional features or other embodiments incorporating different combinations of the stated features. For example, various embodiments are set forth as exemplary embodiments and may be recited in the dependent claims. Unless otherwise noted, the exemplary embodiments or components thereof may be combined or may be applied separate from each other.

As set forth in more detail below, various embodiments of the disclosure provide methods for depositing phosphorous-doped silicon on a surface of a substrate. Exemplary methods can be used to, for example, form source and/or drain regions of semiconductor devices that exhibit relatively high mobility, relatively low contact resistance, and that maintain the structure and composition of the deposited layers. In some embodiments, the present methods involve selectively depositing phosphorous-doped silicon.

In this disclosure, “gas” can include material that is a gas at normal temperature and pressure (NTP), a vaporized solid and/or a vaporized liquid, and can be constituted by a single gas or a mixture of gases, depending on the context. A gas other than the process gas, i.e., a gas introduced without passing through a gas distribution assembly, a multi-port injection system, other gas distribution device, or the like, can be used for, e.g., sealing the reaction space, and can include a seal gas, such as a rare gas. In some cases, the term “precursor” can refer to a compound that participates in the chemical reaction that produces another compound, and particularly to a compound that constitutes a film matrix or a main skeleton of a film; the term “reactant” can be used interchangeably with the term precursor.

As used herein, the term “substrate” can refer to any underlying material or materials that can be used to form, or upon which, a device, a circuit, or a film can be formed. As set forth in more detail below, a surface of a substrate can include two or more areas, wherein each of the two or more areas comprise different material.

As used herein, the term “epitaxial layer” can refer to a substantially single crystalline layer upon an underlying substantially single crystalline substrate or layer.

As used herein, the term “chemical vapor deposition” can refer to any process wherein a substrate is exposed to one or more volatile precursors, which react and/or decompose on a substrate surface to produce a desired deposition.

As used herein, the term “film” and/or “layer” can refer to any continuous or non-continuous structures and material, such as material deposited by the methods disclosed herein. For example, film and/or layer can include two-dimensional materials, three-dimensional materials, nanoparticles or even partial or full molecular layers or partial or full atomic layers or clusters of atoms and/or molecules. A film or layer may comprise material or a layer with pinholes, which may be at least partially continuous.

As used herein, a “structure” can include a substrate as described herein. Structures can include one or more layers overlying the substrate, such as one or more layers formed according to a method as described herein.

Further, in this disclosure, any two numbers of a variable can constitute a workable range of the variable, and any ranges indicated may include or exclude the endpoints. Additionally, any values of variables indicated (regardless of whether they are indicated with “about” or not) may refer to precise values or approximate values and include equivalents, and may refer to average, median, representative, majority, or the like. Further, in this disclosure, the terms “including,” “constituted by” and “having” refer independently to “typically or broadly comprising,” “comprising,” “consisting essentially of,” or “consisting of” in some embodiments. In this disclosure, any defined meanings do not necessarily exclude ordinary and customary meanings in some embodiments.

The term “carrier gas” as used herein may refer to a gas which is provided to a reactor chamber together with one or more precursors. For example, a carrier gas may be provided to the reactor chamber together with disilane and/or phosphine. Exemplary carrier gasses include N₂ and noble gasses such as Ar.

As opposed to a carrier gas, a purge gas may be provided to a reactor chamber separately, i.e., not together with one or more precursors. This notwithstanding, gasses which are commonly used as carrier gas may also be used as a purge gas, even within the same process. For example, in a cyclic deposition-etch process, N₂ used as a carrier gas may be provided together with disilane and phosphine during deposition pulses, and N₂ used as a purge gas may be used to separate deposition and etch pulses. Hence, it is the manner of how a gas such as N₂ or Ar is provided to the reactor chamber that determines whether it serves as a purge gas or a carrier gas in a specific context.

As set forth in more detail below, various steps of exemplary methods described herein can be performed in the same reaction chamber or in different reaction chambers of, for example, the same cluster tool.

The present disclosure relates to the epitaxial deposition of phosphorous-doped silicon. The presently disclosed methods and devices allow for selective or non-selective deposition of layers with low resistance, at low temperatures.

Described herein is a method for epitaxially growing a phosphorous-doped silicon layer. The method comprises providing a substrate comprising a monocrystalline silicon surface in a reactor chamber. After the substrate has been loaded in the reactor chamber, a gas mixture comprising disilane (Si₂H₆), phosphine (PH₃), and a carrier gas is introduced into the reactor chamber. Preferably, this gas mixture consists entirely of disilane, phosphine, and the carrier gas. While the gas mixture is provided to the reactor chamber, a phosphorous doped silicon layer is epitaxially grown on the monocrystalline silicon surface.

In accordance with exemplary embodiments of the disclosure, a selective deposition method is disclosed. Exemplary selective deposition methods include providing a substrate, comprising a surface comprising a first area comprising a silicon surface. The silicon surface preferably has a hydrogen termination. The substrate further comprises a second area comprising a second material, within a reaction chamber. The method comprises the step of selectively depositing a phosphorous-doped silicon layer overlying the first area.

In other words, provided herein is a method for selectively growing an epitaxial phosphorous-doped silicon layer. The method comprises providing a substrate in a reactor chamber. The substrate comprises a first area comprising a first material a second area comprising a second material. The first area has a monocrystalline silicon surface. The method comprises selectively growing a phosphorous-doped epitaxial silicon layer on the monocrystalline silicon surface.

Suitable carrier gasses include nitrogen and noble gasses. Suitable noble gasses may include He, Ne, Ar, Kr, and Xe. When a noble gas is used as a carrier gas, the carrier gas preferably comprises Ar. In some embodiments, the carrier gas consists of N₂.

It shall be understood that the present methods may be carried out after any suitable pre-clean. One possible pre-clean is a plasma clean that results in an H-terminated silicon surface. Another possible pre-clean uses wet chemistry. For example, the following sequence may be used: surface oxidation in a mixture consisting of NH₄OH, H₂O₂, and HO; followed by a rinse; followed by an HF dip; followed by a rinse. A suitable HF dip comprises a dip in a mixture consisting of 0.1 vol. % HF in water.

Selective growth is achieved by cyclically performing the following sequence of sub steps i. and ii. Step i. comprises epitaxially growing a phosphorous doped silicon layer on the monocrystalline silicon surface and growing a phosphorous doped amorphous silicon layer on the second surface by introducing disilane, phosphine, and a carrier gas into the reactor chamber. Step ii. comprises etching the epitaxial phosphorous doped silicon layer and etching the phosphorous doped amorphous silicon layer on the second surface by introducing an etchant into the reactor chamber. The sequence of sub steps i. and ii. is then repeated until the epitaxial phosphorous doped silicon layer on the monocrystalline silicon surface has reached a pre-determined thickness.

The etch step (ii) can be performed in the same reaction chamber used during the deposition step (i). Alternatively, the etch step can be performed in another reaction chamber, such as another reaction chamber in the same cluster tool as the reaction chamber used during the deposition step. The temperature and/or pressure which is maintained during the etching step can be the same or similar to the temperature and/or pressure described above in connection with the deposition step.

In some embodiments, the sequence of the deposition step and etching step are repeated as desired until a pre-determined thickness of the phosphorous-doped silicon layer is formed overlaying the first area. For example, the deposition step and the etching step can be repeated from at least 1 to at most 1,000 times, from at least 2 to at most 100 times, from at least 2 to at most 50 times, from at least 2 to at most 30 times, from at least 2 to at most 20 times, or from at least 5 to at most 15 times, or from at least 8 to at most 12 times.

It shall be understood that selectivity may be obtained through any one of the following mechanisms: 1) amorphous silicon grows at a slower rate in the second area than epitaxial silicon in the first area, 2) amorphous silicon growth on the second surface exhibits delayed growth with respect to epitaxial silicon in the first area, and/or 3) amorphous silicon in the second area is etched at a faster rate than epitaxial silicon in the first area. Thus, an epitaxial phosphorous-doped silicon layer may be grown in the first area whereas no deposition occurs in the second area. In other words, an epitaxial phosphorous-doped silicon film is grown on a first surface in the first area whereas after deposition, no or no substantial amount of amorphous silicon remains on a second surface in the second area.

In some embodiments, Cl₂ is used as an etchant. In some embodiments, Cl₂ is provided during the etch cycles to the reaction chamber at a flow rate from at least 5.0 sccm to at most 100.0 sccm, or from at least 10.0 sccm to at most 50.0 sccm, or from at least 15.0 sccm to at most 40.0 sccm, or from at least 20.0 sccm to at most 30.0 sccm.

In some embodiments, the etch cycles may last from at least 1.0 stoat most 400.0 s, or from at least 2.0 s to at most 200.0 s, or from at least 4.0 s to at most 100.0 s, or from at least 8.0 s to at most 50.0 s, or from at least 10.0 s to at most 40.0 s, or from at least 20.0 s to at most 30.0 s.

In some embodiments, temperature and pressure are kept constant throughout the deposition cycles and the etch cycles.

In some embodiments, the deposition cycles and the etch cycles are separated by purges. In some embodiments, N₂ is used as a purge gas. In some embodiments, the purges last from at least 5.0 s to at most 80.0 s, or from at least 10.0 s to at most 40.0 s, or from at least 15.0 to at most 30.0 s, or for about 20.0 s. In some embodiments, the purge gas is provided to the reaction chamber during the purges at a flow rate of at least 5,000 to at most 100,000 sccm, or of at least 10,000 to at most 50,000 sccm, or of at least 20,000 to at most 30,000 sccm.

Suitable purge gasses include nitrogen and the noble gasses. Suitable noble gasses may include He, Ne, Ar, Kr, and Xe. In some embodiments, the purge gas consists of N₂.

In some embodiments, the etchant comprises an elementary halogen. Preferably, the etchant consists of chlorine.

In some embodiments, etch cycles and deposition cycles can be at different pressures. Preferably, the pressure during the etch cycles and the pressure during the deposition cycles differ by no more than 10%, or by no more than 20%, or by no more than 50%, or by no more than 100%, or by no more than 200%, or by no more than 500%, or by no more than 1,000%. Keeping the difference between etch cycle pressure and deposition cycle pressure limited in this way may speed up processing time by limiting the amount of time needed for pumping between the deposition cycles and the etch cycles.

The first area comprises a first surface. The first surface may be a silicon surface. The second area has a surface that can include, for example, a dielectric material, such as an oxide, a nitride, an oxynitride, an oxycarbide, an oxycarbide nitride, and/or the like, such as silicon nitride, silicon oxide (SiO₂), silicon carbide and mixtures thereof, such as SiOC, SiOCN, SiON. In other words, the second material can include, for example, a dielectric material, such as an oxide, a nitride, an oxynitride, an oxycarbide, an oxycarbide nitride, and/or the like, such as silicon nitride, silicon oxide (SiO₂), silicon carbide and mixtures thereof, such as SiOC, SiOCN, SiON. Preferably, the second area has a silicon oxide surface. In other words, the second material preferably consists of silicon oxide (SiO₂).

During the epitaxial growth of phosphorous-doped silicon, be it selective or not, the substrate is maintained at a temperature of at least 350.0° C. to at most 450.0° C. In some embodiments, the phosphorus doped silicon layer is epitaxially grown at a temperature of at least 370° C. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a temperature of at least 400° C. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a temperature of at most 450° C. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a temperature of at most 440° C. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a temperature of at most 430° C. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a temperature of at most 420° C. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a temperature of at most 410° C. In other words, in some embodiments, the reaction chamber is maintained at the aforementioned temperatures during the epitaxial deposition of the phosphorous-doped silicon. The temperatures mentioned herein may be measured by means of a thermocouple under the substrate's susceptor and/or by means of a pyrometer suspended in the reactor chamber and above the substrate.

During the epitaxial growth of phosphorous-doped silicon, be it selective or not, the reactor chamber is maintained at a pressure of at least 10,600 Pa. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a pressure of at least 13,300 Pa. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a pressure of at least 20,000 Pa. In some embodiments, the phosphorous doped silicon layer is epitaxially grown at a pressure of at most 100,000 Pa. In other words, in some embodiments, the reaction chamber is maintained at the aforementioned pressures during the epitaxial deposition of the phosphorous-doped silicon.

During a selective process comprising a sequence of deposition and etch cycles, the pressure during the etch cycles may be the same as the pressure used during the deposition cycles. This notwithstanding, and in some embodiments, the pressure during the etch cycles may be different than the pressure used during the deposition cycles. In some embodiments, the pressure during the etch cycles equals the pressure during the deposition cycles within a margin of error of 50%, or within a margin of error of 40%, or within a margin of error of 30%, or within a margin of error of 20%, or within a margin of error of 10%, or within a margin of error of 5%.

In some embodiments, the pressure during the etch cycles is at most 12,000 Pa. This pressure range may improve process safety. In some embodiments, the pressure during the etch cycles is from at least 1,300 Pa to at most 10,700 Pa, or from at least 3,000 Pa to at most 8,000 Pa, or from at least 4,000 Pa to at most 6,000 Pa.

In some embodiments, phosphine and disilane are provided to the reactor chamber at a phosphine disilane flow rate ratio that equals from at least 0.5 to at most 1.4. The phosphine disilane flow rate ratio is defined by the phosphine flow rate divided by the disilane flow rate. In some embodiments, the phosphine disilane flow rate ratio is from at least 0.6 to 1.2.

In some embodiments, the disilane carrier gas flow rate ratio is from at least from at least 0.15 to at most 0.40. The disilane carrier gas flow rate ratio equals the disilane flow rate divided by the carrier gas flow rate. In some embodiments, the disilane carrier gas flow rate ratio is from at least from at least 0.25 to at most 0.35.

Note that the flow rates and flow rate ratios used herein are volumetric flow rates and flow rate ratios based on volumetric flow rates.

In accordance with yet additional embodiments of the disclosure, a device or portion thereof can be formed using a method and/or a structure as described herein. The phosphorous-doped silicon layer can be used to form a source or drain contact of the device. The device can be, for example, a field effect transistor (FET) (e.g., a FinFET, gate all around transistor, or a stack comprising multiple transistor devices).

In some embodiments, N₂ is used as a carrier gas. In some embodiments, the carrier gas is provided to the reactor chamber at a flow rate from at least 500 sccm to at most 5,000 sccm, or from at least 750 sccm to at most 2500 sccm, or from at least 1,000 sccm to at most 2,000 sccm, or of 1,500 sccm.

In some embodiments, disilane is used as a silicon precursor and is provided to the reactor chamber at a flow rate of at least 150 sccm to at most 2500 sccm, or of at least 300 sccm to at most 1,500 sccm, or of at least 400 sccm to at most 1,000 sccm, or of at least 500 sccm to at most 700 sccm.

In some embodiments, phosphine is used as a phosphorous source and is provided to the reactor chamber at a flow rate of at least 100 sccm to at most 2,500 sccm or of at least 200 sccm to at most 1,500 sccm or of at least 300 sccm to at most 1,000 sccm, or of at least 400 sccm to at most 600 sccm, or of 500 sccm.

Further described herein is a system comprising one or more reaction chambers, a gas injection system, and a controller configured for causing the system to perform a method as described herein.

Examples

In a first example, reference is made to FIG. 1. FIG. 1 illustrates a (e.g., selective deposition) method (100) in accordance with exemplary embodiments of the disclosure. The method (100) includes the steps of providing a substrate within a reaction chamber (step 102), selectively or non-selectively depositing a first doped semiconductor layer (step 104), an optional etching step (step 108), optionally repeating the deposition step (104) and the etching step (108) (loop 110), and ending (step 112).

With reference to FIG. 1 and FIG. 2, a substrate (or structure) (200) provided during step (102) can include a first area (206) comprising a first material (e.g., (mono)-crystalline bulk material (202)) and a second area (208) comprising a second material (e.g., non-monocrystalline material (204)). The first material can include a monocrystalline surface (210); second area (208) can include a non-monocrystalline surface (212), such as a polycrystalline surface or an amorphous surface. The monocrystalline surface (210) may be a monocrystalline silicon surface. The non-monocrystalline surface (212) may include, for example, dielectric materials, such as oxides, oxynitrides, nitrides, oxycarbides, or oxycarbide nitrides, including, for example, silicon oxides, silicon nitrides, silicon oxynitrides, silicon carbides and mixtures thereof, such as SiOC, SiOCN, and SiON.

As a non-limiting example, the reaction chamber used during the step (102) of providing the substrate may comprise a reaction chamber of a chemical vapor deposition system. However, it is also contemplated that other reaction chambers and alternative chemical vapor deposition systems may also be utilized to perform the embodiments of the present disclosure. The reaction chamber can be a stand-alone reaction chamber or part of a cluster tool.

The substrate providing step (102) can include heating the substrate to a desired deposition temperature within the reaction chamber. In some embodiments of the disclosure, the substrate providing step (102) includes heating the substrate to a temperature of less than approximately 450° C., or even to a temperature of less than approximately 400° C. For example, in some embodiments of the disclosure, heating the substrate to a deposition temperature may comprise heating the substrate to a temperature of at least 370° C. to at most 420° C. The deposition temperature is maintained throughout the deposition step (104) and the etching step (108).

In addition to controlling the temperature of the substrate, a pressure within the reaction chamber may also be regulated. For example, in some embodiments of the disclosure, the pressure within the reaction chamber during the substrate loading step (102), the deposition step (104), and the etching step (108) may be from at least 1 to at most 760 Torr, or from at least 2 to at most 500 Torr, or from at least 4 to at most 400 Torr, or from at least 10 to at most 350 Torr, or from at least 25 to at most 300 Torr, or from at least 50 to at most 250 Torr, or from at least 100 to at most 200 Torr, or of 160 Torr.

The silicon precursor used for the present deposition process consists of disilane (Si₂H₆). Phosphine (PH₃) is used as a dopant precursor, i.e., as a source of phosphorous which is included in the deposited layer. In some embodiments, the n-type dopant precursor may be provided in diluted form and the diluted form may comprise approximately 1% to approximately 15% dopant precursor in a carrier gas.

FIG. 3 illustrates a system (700) in accordance with yet additional exemplary embodiments of the disclosure. The system (700) can be used to perform a method as described herein and/or form a structure or device portion as described herein.

In the illustrated example, the system (700) includes an optional substrate handling system (702), one or more reaction chambers (704), a gas injection system 706, and optionally a wall (708) disposed between reaction chamber(s) 704 and substrate handling system 702. The system (700) can also include a first gas source (710), a second gas source (712), a third gas source (714), a fourth gas source (716), an exhaust source (726), and a controller (728). At least one of the first through fourth gas source includes a disilane source. At least one of the first through fourth gas source includes a carrier gas source, for example a N₂ source. At least one of the first through fourth gas source includes a PH₃ source.

Although illustrated with four gas sources (710-716), the system (700) can include any suitable number of gas sources. The gas sources (710-716) can each include, for example, a precursor gas, such as disilane or PH₃, including mixtures of such precursors and/or mixtures of one or more precursors with a carrier gas. Additionally or alternatively, one of gas sources 710-716 or another gas source can include an etchant, such as an elementary halogen—e.g., chlorine. Gas sources 710-716 can be coupled to reaction chamber 704 via lines 718-724, which can each include flow controllers, valves, heaters, and the like.

System 700 can include any suitable number of reaction chambers 704 and substrate handling systems 702. Further, one or more reaction chambers 704 can be or include a cross-flow, cold wall epitaxial reaction chamber.

Vacuum source 720 can include one or more vacuum pumps.

Controller 728 can be configured to perform various functions and/or steps as described herein. For example, controller 728 can be configured for causing the system (700) to perform a method for epitaxially growing a phosphorous-doped silicon layer comprising: providing a substrate comprising a monocrystalline silicon surface in a reactor chamber; introducing disilane, phosphine, and a carrier gas into the reactor chamber; and, epitaxially growing a phosphorous doped silicon layer on the monocrystalline silicon surface at a temperature of at least 350.0° C. to at most 450.0° C. and at a pressure of at least 10,600 Pa.

Additionally or alternatively, the controller (728) can be configured for causing the system (700) to perform a method for selectively growing an epitaxial phosphorous-doped silicon layer. This method comprises the step of providing a substrate in a reactor chamber. The substrate comprises a first surface and a second surface. The first surface is a monocrystalline silicon surface. The method further comprises the step selectively growing a phosphorous-doped epitaxial silicon layer on the monocrystalline silicon surface by cyclically performing the following sequence of sub steps i. and ii. at a temperature of at least 350.0° C. to at most 450.0° C. and at a pressure of at least 10,600 Pa. Sub step i. includes epitaxially growing a phosphorous doped silicon layer on the monocrystalline silicon surface and growing a phosphorous doped amorphous silicon layer on the second surface by introducing disilane, phosphine, and a carrier gas into the reactor chamber. Sub step ii. includes etching the epitaxial phosphorous doped silicon layer and etching the phosphorous doped amorphous silicon layer on the second surface by introducing an etchant into the reactor chamber; wherein the sequence of sub steps i. and ii. is repeated until the epitaxial phosphorous doped silicon layer on the monocrystalline silicon surface has reached a pre-determined thickness.

It shall be understood that the repeated execution of steps i. and ii. results in the growth of an epitaxial phosphorous-doped silicon layer on the monocrystalline silicon surface whereas no, or no substantial amount of, phosphorous-doped silicon is formed on the second surface. Without the invention being bound by theory or any particular mode of operation, this is believed to occur by means of one or both of the following two mechanisms. First, the growth of amorphous silicon on the second surface may be slower than the growth of the epitaxial crystalline silicon on the first surface. Second, the etching rate of amorphous silicon on the second surface may be faster than the etching rate of the epitaxial crystalline silicon on the first surface.

A controller (728) can include one or more microprocessors, memory elements, and/or switching elements to perform the various functions. Although illustrated as a single unit, the controller (728) can alternatively comprise multiple devices. By way of examples, the controller (728) can be used to control gas flow (e.g., by monitoring flow rates of precursors and/or other gases from the gas sources (710-716) and/or controlling valves, motors, heaters, and the like). Further, when the system (700) includes two or more reaction chambers, the two or more reaction chambers can be coupled to the same/shared controller.

During operation of reactor system (700), substrates, such as semiconductor wafers (not illustrated), are transferred from, e.g., a substrate handling system (702), to a reaction chamber (704). Once substrate(s) are transferred to the reaction chamber (704), one or more gases from gas sources (710-716), such as precursors, dopants, carrier gases, and/or purge gases, are introduced into the reaction chamber (704) via a gas injection system (706). A gas injection system (706) can be used to meter and control gas flow of one or more gases (e.g., from one or more gas sources (710-716)) during substrate processing and to provide desired flows of such gas(es) to multiple sites within the reaction chamber (704).

In a further example, reference is made to a set of process conditions which, when used in a method according to example 1 for non-selective deposition of phosphorous-doped silicon, may yield particularly good results. A 300 mm wafer may be used as a substrate and a flow rate of 1500 sccm (standard cubic centimeters per minute) carrier gas may be maintained. N₂ is suitably used as a carrier gas. Disilane at a flow rate of 600 sccm may be used as a precursor. A wafer temperature of 400° C. may be maintained and the reactor pressure may be 21,300 Pa. The wafer temperature may be measured by means of a thermocouple under the wafer's susceptor and/or by means of a pyrometer suspended above the wafer. Phosphine may be used as a phosphorous precursor, and the phosphine flow rate may be 500 sccm. This process may result in epitaxial silicon growth on monocrystalline silicon surfaces at a growth rate of 0.9 nm per minute. On silicon oxide, amorphous silicon may be grown at the same growth rate. This process may result an as-grown (i.e., not annealed) phosphorous doped silicon layer with a resistivity of only 0.2 mOhm·cm.

In a further example, reference is made to a set of process conditions which, when used in a method according to example 1 for selective deposition of phosphorous-doped silicon, may yield particularly good results. A 300 mm wafer may be used as a substrate. The selective process according to the present example may comprise a plurality of deposition cycles and a plurality of etch cycles which are alternated consecutively as shown in FIG. 1. The deposition cycles may employ specific process conditions as detailed above for non-selective growth of phosphorous-doped silicon. In the etch cycles, Cl₂ may be used as an etchant and may be flown at a flow rate of 25 sccm. Temperature and pressure are kept constant throughout the deposition cycles. Also, purges may be used between the deposition and etch cycles. Suitable purges may include flowing a carrier gas such as N₂ for 20 s at a flow rate of at least 20,000 to at most 30,000 sccm. The etch cycles may last from at least 10.0 s to at most 40.0 s. The duration of the deposition cycles may depend on the desired layer thickness. In an exemplary process, the deposition cycles last from at least 50 s to at most 500 s, for example, 250 s.

Without the present invention being bound by any theory or particular mode of operation, it is believed that a nucleation delay on the dielectric layer under the presently disclosed process conditions may, when combined with etch cycles, result in selective deposition.

The example embodiments of the disclosure described above do not limit the scope of the invention, since these embodiments are merely examples of the embodiments of the invention, which is defined by the appended claims and their legal equivalents. Any equivalent embodiments are intended to be within the scope of this invention. Indeed, various modifications of the disclosure, in addition to those shown and described herein, such as alternative useful combinations of the elements described, may become apparent to those skilled in the art from the description. Such modifications and embodiments are also intended to fall within the scope of the appended claims. 

What is claimed is:
 1. A method for epitaxially growing a phosphorous-doped silicon layer comprising: providing a substrate comprising a monocrystalline silicon surface in a reactor chamber; and, introducing disilane, phosphine, and a carrier gas into the reactor chamber while maintaining the reaction chamber at a temperature of at least 350.0° C. to at most 450.0° C. and at a pressure of at least 10,600 Pa to epitaxially grow a phosphorous doped silicon layer on the monocrystalline silicon surface, wherein the carrier gas consists of nitrogen and/or one or more noble gasses.
 2. The method according to claim 1, wherein the reaction chamber is maintained at a temperature of at least 370° C.
 3. The method according to claim 2, wherein the reaction chamber is maintained at a temperature of at least 400° C.
 4. The method according to claim 1, wherein the reaction chamber is maintained at a temperature of at most 420° C.
 5. The method according to claim 1, wherein the reaction chamber is maintained at a pressure of at least 13,300 Pa.
 6. The method according to claim 5, wherein the reaction chamber is maintained at a pressure of at least 20,000 Pa.
 7. The method according to claim 1, wherein the reaction chamber is maintained at a pressure of at most 100,000 Pa.
 8. The method according to claim 1, wherein the disilane is provided to the reactor chamber at a disilane flow rate, wherein the phosphine is provided to the reactor chamber at a phosphine flow rate, wherein the phosphine flow rate divided by the disilane flow rate equals a phosphine disilane flow rate ratio, and wherein the phosphine disilane flow rate ratio is from at least 0.5 to at most 1.4.
 9. The method according to claim 8, wherein the phosphine disilane flow rate ratio is from at least 0.6 to 1.2.
 10. The method according to claim 1, wherein the disilane is provided to the reactor chamber at a disilane flow rate, wherein the carrier gas is provided to the reactor chamber at a carrier gas flow rate, wherein the disilane flow rate divided by the carrier gas flow rate equals a disilane carrier gas flow rate ratio, and wherein the disilane carrier gas flow rate ratio is from at least from at least 0.15 to at most 0.40.
 11. The method according to claim 10, wherein the disilane carrier gas flow rate ratio is from at least from at least 0.25 to at most 0.35.
 12. A system comprising one or more reaction chambers, a gas injection system, and a controller configured for causing the system to perform a method according to claim
 1. 13. A method for selectively growing an epitaxial phosphorous-doped silicon layer comprising the steps: providing a substrate in a reactor chamber, the substrate comprising a first surface and a second surface, wherein the first surface is a monocrystalline silicon surface; and, selectively growing a phosphorous-doped epitaxial silicon layer on the monocrystalline silicon surface by cyclically performing the following sequence of sub steps i. and ii. while maintaining the reaction chamber at a temperature of at least 350.0° C. to at most 450.0° C. and at a pressure of at least 10,600 Pa: i. epitaxially growing a phosphorous doped silicon layer on the monocrystalline silicon surface and growing a phosphorous doped amorphous silicon layer on the second surface by introducing disilane, phosphine, and a carrier gas into the reactor chamber; and, ii. etching the epitaxial phosphorous doped silicon layer and etching the phosphorous doped amorphous silicon layer on the second surface by introducing an etchant into the reactor chamber; wherein the sequence of sub steps i. and ii. is repeated until the epitaxial phosphorous doped silicon layer on the monocrystalline silicon surface has reached a pre-determined thickness, and wherein the carrier gas consists of nitrogen and/or one or more noble gasses.
 14. The method according to claim 13, wherein the second surface is a dielectric surface.
 15. The method according claim 13, wherein the second surface is selected from the list consisting of a silicon oxide surface, a silicon nitride surface, a silicon oxycarbide surface, a silicon oxynitride surface, a hafnium oxide surface, a zirconium oxide surface, and an aluminum oxide surface.
 16. The method according to claim 13, wherein the disilane is provided to the reactor chamber at a disilane flow rate, wherein the phosphine is provided to the reactor chamber at a phosphine flow rate, wherein the phosphine flow rate divided by the disilane flow rate equals a phosphine disilane flow rate ratio, and wherein the phosphine disilane flow rate ratio is from at least 0.5 to at most 1.4.
 17. The method according to claim 16, wherein the phosphine disilane flow rate ratio is from at least 0.6 to 1.2.
 18. The method according to claim 13, wherein the disilane is provided to the reactor chamber at a disilane flow rate, wherein the carrier gas is provided to the reactor chamber at a carrier gas flow rate, wherein the disilane flow rate divided by the carrier gas flow rate equals a disilane carrier gas flow rate ratio, and wherein the disilane carrier gas flow rate ratio is from at least from at least 0.15 to at most 0.40.
 19. The method according to claim 18, wherein the disilane carrier gas flow rate ratio is from at least from at least 0.25 to at most 0.35.
 20. The method according to claim 13, wherein the reaction chamber is maintained at a pressure of at most 100,000 Pa. 